https://platoblockchain.com/plato-data/hitachi-high-tech-launches-the-gt2000-high-precision-electron-beam-metrology-system-to-meet-the-needs-of-semiconductor-devices-development-and-mass-production-in-the-high-na-euv-generation/
Hitachi High-Tech Launches the GT2000, High-Precision Electron Beam Metrology System to Meet the Needs of Semiconductor Devices Development and Mass Production in the High-NA EUV Generation