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https://www.atomiclimits.com/2017/04/10/ald-enabled-nanopatterning-area-selective-ald-by-area-activation-reflecting-on-asd-2016-with-the-asd-2017-workshop-approaching/
ALD-enabled nanopatterning: area-selective ALD by area-activation <i>– Reflecting on ASD 2016 with the ASD 2017 workshop approaching</i>