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https://www.atomiclimits.com/2017/08/25/in-situ-spectroscopic-ellipsometry-and-ald-how-ellipsometry-became-a-popular-technique-to-monitor-ald-film-growth/
<i>In situ</i> spectroscopic ellipsometry and ALD <i>– How ellipsometry became a popular technique to monitor ALD film growth</i>