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https://www.atomiclimits.com/2019/07/18/fully-self-aligned-vias-the-killer-application-for-area-selective-ald-a-discussion-of-the-requirements-for-implementation-in-high-volume-manufacturing/
Fully self-aligned vias: the killer application for area-selective ALD? – <i>A discussion of the requirements for implementation in high volume manufacturing</i>