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https://www.atomiclimits.com/2019/11/28/atomic-layer-deposition-turns-45-the-history-of-ald-in-a-timeline-and-an-animated-version-of-the-ald-periodic-table/
Atomic layer deposition turns 45! – <i>The history of ALD in a timeline and an animated version of the ALD periodic table</i>