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https://www.atomiclimits.com/2020/03/02/atomic-layer-etching-turns-32-5-years-old-a-good-occasion-to-share-an-ale-timeline-and-an-animated-version-of-the-ale-periodic-table/
Atomic layer etching turns 32.5 years old! – <i>A good occasion to share an ALE timeline and an animated version of the ALE periodic table</i>