https://picante.today/it-industry/2021/09/24/209498/acm-research-ships-its-first-300mm-high-temp-single-wafer-spm-tool-for-advanced-logic-dram-and-3d-nand-semiconductor-manufacturing/
ACM Research Ships Its First 300mm, High-Temp Single-Wafer SPM Tool for Advanced Logic, DRAM and 3D-NAND Semiconductor Manufacturing